Film Stress Measurement System
| Tool ID: 13 | Film Stress Measurement System |
| Tencor | |
| description | Non contact measurement of residual stress for thin film |
| details | Subtrate size: 6inch and 4inch |
| Person in charge | Pierre Huet |
| Location | Etch/Dep |
| Booking | Unbookable |
| Tool Rate | |
| Installation Date | Feb-2002 |
| Tips and Recommendations | |
| Status | ONLINE |
| Comment | |
| Max Book Time | 1 |
Previous Equipment 